DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs : Fabricating Microelectromechanical Systems in Open Use Labs | 1st edition

by Deborah Munro

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Publisher	Springer Nature
Language	English
Book type	Paperback
Utgiven	2020-12-20
Edition	1
Pages	188
ISBN	9783030330750
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Description

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources.

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