by Simon M. Sze
| Publisher | John Wiley And Sons Ltd |
| Language | English |
| Book type | Hardcover |
| Utgiven | 2001-09-30 |
| Edition | 2 |
| Pages | 576 |
| ISBN | 9780471333722 |
| Kategori(er) |
Nature science & Tech ↳ Physics |
This book is an introduction to the physical principles of modern semiconductor devices and their advanced fabrication technology. It begins with a brief historical review of major devices and key technologies and is then divided into three sections: semiconductor material properties, physics of semiconductor devices and processing technology to fabricate these semiconductor devices. (Bookdata)
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